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A Novel Suspended Hot-Plate on Micromachined Ceramic Substrate

Excerpt

A novel ceramic hot-plate with a wire-free bonding was investigated. The devices were made on the popular alumina ceramic flakes with a platinum heater. First results of hotplate including design, Finite Element Method (FEM) simulation, manufacturing and tests are presented in this paper. The measurement results show that the hot-plate has lower power consumption (400 mW at 250 °C) than classical ceramic gas sensors and high working temperatures (600 °C or more) than silicon hot-plate. It is very promising in the application of high temperature gas sensors.

  • Abstract
  • Key Words
  • 1 Introduction
  • 2. Design and Fem Simulation
  • 3 Experimental Procedures
  • 4. Results and Discussions
  • 5. Summaries
  • References

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