Micro-Plasma Sensor for Gas Analysis by Collisional Electron Spectroscopy (CES) Method


Theoretical consideration of Collisional Electron Spectroscopy (CES) for gaseous media analysis and experimental results on CES sensor are presented. It is demonstrated that a diffusion path confinement for characteristic electrons provides a possibility to measure electrons energy distribution function (EEDF) and to find characteristic spectra of species at high (up to atmospheric) gas pressure. Simple micro-plasma CES detector of two plane parallel electrode configuration with current-voltage measurement in afterglow of helium glow discharge may be designed to operate at a high gas pressure up to atmospheric one. Experimental electron energy spectra of pair He metastables collisions in dependence of inter-electrode gap are discussed.

  • Abstract
  • Keywords
  • 1. Introduction
  • 2. Acknowledgements
  • 3. References

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